Methods for fabricating integrated circuit field effect transistors including channel-containing fin having regions of high and low doping concentrations

ABSTRACT

Integrated circuit field effect transistors include an integrated circuit substrate and a fin that projects away from the integrated circuit substrate, extends along the integrated circuit substrate, and includes a top that is remote from the integrated circuit substrate. A channel region is provided in the fin that is doped a conductivity type and has a higher doping concentration of the conductivity type adjacent the top than remote from the top. A source region and a drain region are provided in the fin on opposite sides of the channel region, and an insulated gate electrode extends across the fin adjacent the channel region. Related fabrication methods also are described.

RELATED APPLICATIONS

This application is a divisional of application Ser. No. 10/801,614,filed Mar. 16, 2004, entitled Integrated Circuit Field EffectTransistors Including Channel-Containing Fin Having Regions Of High AndLow, Doping Concentration, now U.S. Pat. No. 7,122,871, and claims thebenefit of Korean Patent Application No. 2003-0040279, filed Jun. 20,2003, the disclosures of both of which are hereby incorporated herein byreference in their entirety as if set forth fully herein.

FIELD OF THE INVENTION

This invention relates to integrated circuit devices and fabricationmethods therefor, and more particularly to integrated circuit fieldeffect transistors and fabrication methods therefor.

BACKGROUND OF THE INVENTION

Integrated circuit field effect transistors are widely used inintegrated circuit devices, such as logic, memory and/or processordevices. For example, integrated circuit field effect transistors arewidely used in Dynamic Random Access Memory (DRAM) devices. As is wellknown, a conventional integrated circuit field effect transistorincludes spaced apart source and drain regions in an integrated circuitsubstrate, with an insulated gate electrode therebetween. In operation,a channel is formed in the substrate between the source and drainregions and beneath the insulated gate electrode.

As the integration density of integrated circuit field effect devicescontinues to increase, the channel length may decrease to submicrondimensions. These short channel devices may create various undesirableshort channel effects, such as punch-through. Semiconductor-on-insulatordevices have been developed to potentially reduce short channel effects.In contrast with a bulk field effect transistor that is formed in bulksemiconductor, in a semiconductor-on-insulator device the field effecttransistor is formed in a semiconductor layer on an insulator layer on abase substrate.

In other attempts to reduce short channel and/or other effects,double-gated field effect transistors have been developed. In adouble-gated field effect transistor, a bottom gate and a top gate maybe formed on opposite sides of the channel region.

Field effect transistors having projecting regions also have beendeveloped in attempts to reduce short channel and/or other effects. Forexample, U.S. Pat. No. 5,844,278 to Mizuno et al. describes a“Semiconductor Device Having a Projecting Element Region”, as noted inthe Mizuno et al. Title. As noted in the Mizuno et al. Abstract, asemiconductor device includes a substrate having a projection-shapedsemiconductor element region, a gate electrode formed through a gateinsulating film on the upper face and side face of the element region,and a first conductivity type source region and drain region provided ina manner to form a channel region on the upper face of the elementregion across the gate electrode, and which has a high concentrationimpurity region containing a second conductivity type impurity at aconcentration higher than that on the surface of the channel region inthe central part of the projection-shaped semiconductor element region.

SUMMARY OF THE INVENTION

Integrated circuit field effect transistors according to someembodiments of the present invention include an integrated circuitsubstrate and a fin that projects away from the integrated circuitsubstrate, extends along the integrated circuit substrate, and includesa top that is remote from the integrated circuit substrate. A channelregion is provided in the fin that is doped a predetermined conductivitytype and has a higher doping concentration of the predeterminedconductivity type adjacent the top than remote from the top. A sourceregion and a drain region are provided in the fin on respective oppositesides of the channel region, and an insulated gate electrode extendsacross the fin adjacent the channel region.

In some embodiments, the channel region is uniformly doped apredetermined conductivity type at a first doping concentration, exceptfor being doped the predetermined conductivity type at a second dopingconcentration that is higher than the first doping concentrationadjacent the top. In other embodiments, the channel region comprises afirst region of the predetermined conductivity type adjacent the top,and a second region of the predetermined conductivity type remote fromthe top, wherein the first region is more heavily doped than the secondregion. In yet other embodiments, the fin also includes first and secondsidewalls that extend between the top and the substrate, and the channelregion has the higher doping concentration of the predeterminedconductivity type directly beneath the top from the first sidewall tothe second sidewall.

Embodiments of the present invention may be provided using bulksemiconductor and semiconductor-on-insulator substrates. In bulksemiconductor embodiments, a region of the predetermined conductivityalso may be provided in the bulk semiconductor substrate beneath thefin. Integrated circuit field effect transistors according toembodiments of the invention also may be used in DRAM devices, wherein acapacitor is connected to the source region and/or a bit line isconnected to the drain region.

Integrated circuit field effect transistors may be fabricated accordingto some embodiments of the present invention by forming a fin thatprojects away from an integrated circuit substrate, extends along theintegrated circuit substrate and includes a top that is remote from theintegrated circuit substrate. Ions of a predetermined conductivity typeare implanted into the fin orthogonal to the substrate. Ions of thepredetermined conductivity type are implanted into the fin oblique tothe substrate. The oblique implantation may occur prior to or after theorthogonal implantation. Spaced apart source and drain regions areformed in the fin and an insulated gate is formed on the fin. In yetother embodiments, ions are again implanted into the fin orthogonal tothe substrate.

In other embodiments, an integrated circuit transistor is fabricated byforming a fin that extends vertically from a substrate, implanting afirst impurity in an upper portion of the fin, and implanting a secondimpurity in an entire exposed surface of the fin. A gate insulationlayer is formed on the fin, and a gate electrode is formed that crossesover the fin on the gate insulation layer. Source/drain regions areformed in the fin located at both sides of the gate electrode. Theimplantations form a first layer comprised of the first and secondimpurities in the upper portion of the fin, a second layer comprisingthe second impurity in the fin under the first layer, wherein the secondlayer is lightly doped relative to the first layer.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a top plan view of a pair of integrated circuit field effecttransistors that may be used in a DRAM cell according to embodiments ofthe present invention.

FIG. 2A is a cross-sectional view of a pair of integrated circuit fieldeffect transistors according to embodiments of the present inventiontaken along the line I-I of FIG. 1.

FIG. 2B is a cross-sectional view of an integrated circuit field effecttransistor according to embodiments of the present invention taken alongthe line II-II of FIG. 1.

FIGS. 3-8 are cross-sectional views of integrated circuit field effecttransistors according to various embodiments of the present inventionduring intermediate fabrication steps according to various embodimentsof the present invention.

FIG. 9A is a cross-sectional view of a pair of integrated circuit fieldeffect transistors according to embodiments of the present inventiontaken along the line I-I of FIG. 1.

FIG. 9B is a cross-sectional view of an integrated circuit field effecttransistor according to embodiments of the present invention taken alongthe line II-II of FIG. 1.

FIGS. 10-13 are cross-sectional views of integrated circuit field effecttransistors according to various other embodiments of the presentinvention during intermediate fabrication steps according to variousembodiments of the present invention.

DETAILED DESCRIPTION

The present invention now will be described more fully hereinafter withreference to the accompanying drawings, in which embodiments of theinvention are shown. This invention may, however, be embodied in manydifferent forms and should not be construed as limited to theembodiments set forth herein. Rather, these embodiments are provided sothat this disclosure will be thorough and complete, and will fullyconvey the scope of the invention to those skilled in the art. In thedrawings, the size and relative sizes of layers and regions may beexaggerated for clarity. Moreover, each embodiment described andillustrated herein includes its complementary conductivity typeembodiment as well. Like numbers refer to like elements throughout.

It will be understood that when an element such as a layer, region orsubstrate is referred to as being “on” or extending “onto” anotherelement, it can be directly on or extend directly onto the other elementor intervening elements may also be present. In contrast, when anelement is referred to as being “directly on” or extending “directlyonto” another element, there are no intervening elements present. Itwill also be understood that when an element is referred to as being“connected” or “coupled” to another element, it can be directlyconnected or coupled to the other element or intervening elements may bepresent. In contrast, when an element is referred to as being “directlyconnected” or “directly coupled” to another element, there are nointervening elements present.

It will also be understood that if part of an element, such as asurface, is referred to as “outer,” it is closer to the outside of theintegrated circuit than other parts of the element. Furthermore,relative terms such as “beneath” may be used herein to describe arelationship of one layer or region to another layer or region relativeto a substrate or base layer as illustrated in the figures. It will beunderstood that these terms are intended to encompass differentorientations of the device in addition to the orientation depicted inthe figures.

Furthermore, relative terms, such as “lower” and “upper”, may be usedherein to describe one element's relationship to another element asillustrated in the figures. It will be understood that relative termsare intended to encompass different orientations of the device inaddition to the orientation depicted in the figures. For example, if thedevice in the figures is turned over, elements described as being on the“lower” of other elements would then be oriented on “upper” of the otherelements. The exemplary term “lower”, can therefore, encompass both anorientation of lower and upper, depending of the particular orientationof the figure.

Finally, it will also be understood that although the terms first,second. etc. are used herein to describe various regions, layers and/orsections, these regions, layers and/or sections should not be limited bythese terms. These terms are only used to distinguish one region, layeror section from another region, layer or section. Thus, a first region,layer or section discussed below could be termed a second region, layeror section, and similarly, a second region, layer or section may betermed a first region, layer or section without departing from theteachings of the present invention.

FIG. 1 is a top plan view of two field effect transistors according toembodiments of the present invention that may be used as part of theDRAM cell according to embodiments of the present invention. Moreover,other embodiments of the invention can comprise a single field effecttransistor. FIG. 1 will be used as top plan view for FIGS. 2A and 2B,and for FIGS. 9A and 9B. Accordingly, two sets of reference numbers areused in FIG. 1. As shown in FIG. 1, field effect transistors accordingto some embodiments of the present invention include a fin 54 a, 84 anda gate electrode 74, 104. The fin 54 a, 84 extends vertically from asubstrate. Stated differently, the fin 54 a, 84 projects away from anintegrated circuit substrate, extends along the integrated circuitsubstrate and includes a top that is remote from the integrated circuitsubstrate. Gate electrodes 74, 104 cross over the fin 54 a, 84.

Still referring to FIG. 1, a common drain region 76 d, 106 d is formedbetween adjacent gate electrodes 74, 104. In other embodiments, separatedrain regions may be used. A source region 76 s, 106 s is formed onopposite sides of the gate from the common drain region 76 d, 106 d. Achannel region 70, 100 is formed in the fin beneath the gate electrode74, 104.

When a pair of integrated circuit field effect transistors of FIG. 1 areused in a DRAM cell, a bit line may be connected to the common drainregion 76 d, 106 d, and a capacitor may be connected to the sourceregion 76 s, 106 s. These connections are not shown in FIG. 1. However,these connections are conventional.

FIGS. 2A-8 illustrate embodiments of the invention wherein an integratedcircuit field effect transistor is fabricated in a bulk semiconductorlayer, such as a conventional bulk silicon semiconductor substrate.FIGS. 9A-13 illustrate embodiments of the present invention wherein afield effect transistor is formed on a semiconductor-on-insulatorsubstrate, wherein a semiconductor layer is provided on an insulatinglayer on a base substrate, which may itself be a semiconductorsubstrate. Bulk semiconductor substrates and semiconductor-on-insulatorsubstrates are well known to those having skill in the art and need notbe described further herein.

FIG. 2A is a cross-sectional view of integrated circuit field effecttransistors taken alone the line I-I of FIG. 1 according to someembodiments of the invention. FIG. 2B is a cross-sectional view of anintegrated circuit field effect transistor according to some embodimentsof the present invention, taken along the line II-II of FIG. 1.

Referring to FIGS. 2A and 2B, a device isolation layer 56 is formedusing, for example, conventional trench isolation techniques, to definean active region on an integrated circuit substrate such as a siliconsemiconductor substrate 50. The fin 54 a extends vertically from thesubstrate 50 and is located on the active region. The pair of gateelectrodes 74 crosses over the fin 54 a. A gate insulation layer 72 isinterposed between the gate electrode 74 and the fin 54 a. The channelregion 70 extends vertically from the substrate and is controlled by thegate electrode 74. In some embodiments, when the transistor is turnedon, the channel region 70 is fully depleted.

Without wishing to be bound by any theory of operation, a transistoraccording to some embodiments of the present invention may be thought ofas being comprised of three sub-transistors. The three sub-transistorscan use both sidewalls S and an upper portion or top T of the fin 54 aas a gate channel, respectively. In some embodiments, in order toimprove the switching characteristics and to suppress leakage current inthe off state, it may be desirable for the channel region 70 to have auniform doping concentration. However, an electric field may beconcentrated at the upper portion of the fin 54 a. Thus, before thesub-transistors are turned on, a parasitic transistor, which is formedon the top T of the fin 54 a, may be turned on. In order to reduce orprevent this problem, some embodiments of the present invention canprovide a high threshold voltage of the parasitic transistor at the topT of the fin 54 a by providing a high concentration impurity adjacentthe top T of the fin 54 a.

As shown in FIGS. 2A and 2B, in some embodiments, the channel region 70includes a highly doped region 66 a, and a relatively lightly dopedregion 64. The highly doped region 66 a is formed at the top T of thefin 54 a including the edge of the fin 54 a, and the lightly dopedregion 64 is formed in the fin beneath the highly doped region 66 a.

Source/drain regions may be formed by implanting impurities in the fin54 a at opposite sides of the channel region 70. A common drain region76 d is formed between the gate electrode 74, and a source region 76 sis formed on opposite sides of the common drain region 76 d. The gateelectrodes 74 may be formed on the fin 54 a and on the device isolationlayer 56. Accordingly, in some embodiments, the gate electrode 74 maynot control a portion of the fin located lower than the gate electrode74 that is in contact with the device isolation layer 56. As a result,punch-through may occur at the fin. To reduce or prevent thispunch-through, a transistor according to some embodiments of the presentinvention may further include a punch-through stop layer 62 a. In someembodiments, the punch-through stop layer 62 a is doped at a higherconcentration than the lightly doped region 64.

Accordingly, FIGS. 1, 2A and 2B illustrate integrated circuit fieldeffect transistors according to some embodiments of the presentinvention. These integrated circuit field effect transistors comprise anintegrated circuit substrate 50 and a fin 54 a that projects away fromthe integrated circuit substrate 50, extends along the integratedcircuit substrate 50 and includes a top T that is remote from theintegrated circuit substrate 50. A channel region 70 in the fin is dopeda predetermined conductivity type and has a higher doping concentration(for example, at region 66 a) of the predetermined conductivity typeadjacent the top T than remote from the top (for example, in region 64).A source region 76 s and a drain region 76 d are provided in the fin 54a on respective opposite sides of the channel region 70. An insulatedgate that comprises a gate electrode 74 and a gate insulating layer 72,extends across the fin 54 a, adjacent the channel region 70.

As also illustrated in FIGS. 1, 2A and 2B, in some embodiments, thechannel region 70 is uniformly doped a predetermined conductivity typeat a first doping concentration, for example at region 64, except forbeing doped the predetermined conductivity type at a second dopingconcentration that is higher than the first doping concentrationadjacent the top T, for example at region 66 a. In other embodiments,the channel region 70 comprises a first region 66 a of the predeterminedconductivity type adjacent the top T and a second region 64 remote fromthe top T, wherein the first region 66 a is more heavily doped than thesecond region 64. In still other embodiments, the fin also includesfirst and second sidewalls S that extend between the top T and thesubstrate 50, and the channel region 70 has higher doping concentrationof the predetermined conductivity type directly beneath the top T fromthe first sidewall S to the second sidewall S, for example at region 66a.

FIGS. 3-8 are cross-sectional views of integrated circuit field effecttransistors according to various embodiments of the present inventionduring intermediate fabrication steps according to various embodimentsof the present invention. FIGS. 3-8 correspond to the cross-sectionalviews of FIG. 2B.

Referring to FIG. 3, the semiconductor substrate 50 is patterned to formthe fin structure 54 having a top T and sidewalls S. As shown in FIG. 3,the fin structure 54 extends away from the integrated circuit substrate50 and the device isolation layer 52. An oxide layer may be formed onthe substrate 50 using a conventional thermal oxidation method. Then,the oxide layer may be removed to reduce the width of the fin region 54.

Referring now to FIG. 4, an insulation layer is formed on the substrateincluding on the fin region 54. The insulation layer then may berecessed to form the device isolation layer 56 at the device isolationregion 52. A part of the fin 54 a projects through the device isolationlayer 56. A buffer oxide layer 60 may be further formed on the exposedportion of the fin 54 a.

Referring to FIG. 5, ions are implanted into the substrate including thefin 54 a to form a first region 62 in the substrate 50 beneath theexposed fin 54 a. For example, in some embodiments, the first region 62is formed at a concentration of about 10¹⁵ atoms/cm³ to about 10¹⁹atoms/cm³ by implanting boron (B) or fluorine boron (BF₂) at a dose ofabout 10¹¹ atoms/cm² to about 10¹⁴ atoms/cm². The implantation isgenerally orthogonal to the substrate 50, for example at an implantationangle of about 0° to about 10°.

Referring to FIG. 6, ions are implanted into the surface of the exposedfin 54 a to form a second region 64. In some embodiments, the secondregion 64 is formed conformally on the surface of the exposed fin 54 aby implanting impurities using an oblique ion implantation method. Insome embodiments, the second region 64 may be formed at a concentrationof about 10¹⁵ atoms/cm³ to about 10¹⁹ atoms/cm³ by implanting boron (B)or fluorine boron (BF₂) at dose of about 10¹¹ atoms/cm² to about 10¹⁴atoms/cm². In some embodiments, the oblique implantation angle isbetween about 10° and about 45°. The second region 64 may extend underthe exposed fin 54 a to overlap with the first region 62.

Referring to FIG. 7, ions are implanted into the top T of the exposedfin 54 a to form a third region. In some embodiments, the third region66 is formed at a concentration of about 10¹⁵ atoms/cm³ to about 10¹⁹atoms/cm³ by implanting boron (B) or fluorine boron (BF₂) at dose ofabout 10¹¹ atoms/cm² to about 10¹⁴ atoms/cm². In some embodiments, theorthogonal implantation angle is between about 0° and about 10°.

Accordingly, FIGS. 4-8 illustrate methods of fabricating an integratedcircuit field effect transistor according to some embodiments of thepresent invention, by forming a fin that projects away from anintegrated circuit substrate, extends along the integrated circuitsubstrate and includes a top that is remote from the integrated circuitsubstrate (FIG. 4). FIG. 6 illustrates implanting ions of apredetermined conductivity type into the fin oblique to the substrate,and FIG. 7 illustrates implanting ions of a predetermined conductivitytype into the fin orthogonal to the substrate. FIG. 5 illustrates againimplanting ions of the predetermined conductivity type into the finorthogonal to the substrate. It will be understood that the operationsof FIGS. 5-7 may occur out of the order shown in FIGS. 5-7, so that oneor more of the sequences of implantations may be reversed from thatshown.

Referring now to FIG. 8, as a result of the implantations of FIGS. 5-7,a first region 62 overlaps with the second region 64 to form apunch-through stop layer 62 a, which is some embodiments has a higherdoping concentration than that of the second region 64. The third region66 overlaps with the second region 64 to form a highly doped region 66 aadjacent the top T of the fin 54. The second region 64 forms a uniformlydoped layer in the fin 54 a beneath the highly doped region 66 a. Theuniformly doped layer 64 is relatively lightly doped as compared withthe heavily doped layer 66 a. Thus, the channel region 70 of thetransistor includes the heavily and lightly doped layers 66 a and 64. Inorder to complete the transistor, the buffer oxide 60 may be removed,and the gate insulating layer 54 is formed on the surface of the fin 54a. The gate electrode 74 is formed on the gate insulating layer crossthe fin 54. The source/drain region 76 s and 76 d may be formed in thefin on opposite sides of the gate electrode using the gate electrode asan implantation mask.

FIGS. 9A and 9B are cross-sectional views of integrated circuit fieldeffect transistors according to other embodiments of the presentinvention, taken along lines I-I and II-II, respectively of FIG. 1. Aswas described above, these embodiments form integrated circuit fieldeffect transistors on semiconductor-on-insulator substrates. Morespecifically, as shown in FIGS. 9A and 9B, the fin 84 is formed on aninsulating layer 82, which is itself on a substrate 80, such as asupport substrate. The substrate 80 may be a semiconductor substrate ormay be a non-semiconductor substrate. The fabrication ofsemiconductor-on-insulator substrates are well known to those havingskill in the art, and need not be described further herein.

A pair of gate electrodes 104 cross over the fin 84. A gate insulatinglayer 102 is interposed between the gate electrode 104 and the fin 84.The channel region 100 is formed in the fin 84 adjacent the gateelectrode 104. In some embodiments, when the transistor is turned on,the channel region 100 is completely depleted. A heavily doped layer 88a is formed adjacent the top T of the fin. A lightly doped layer 90 isformed in the fin beneath the highly doped layer. Source/drain regions106 s, 106 d are formed by implanting dopants in the fin 84 located atboth sides of the channel region 70. A common drain region 106 d orseparate drain regions may be formed, and source regions 106 s areformed, as was already described.

FIGS. 10-13 are cross-sectional views of integrated circuit field effecttransistors according to embodiments of the invention that weredescribed in connection with FIG. 9B during intermediate fabricationsteps according to various embodiments of the present invention.

Referring to FIG. 10, the semiconductor layer of thesemiconductor-on-insulator substrate is patterned to form the fin 84. Insome embodiments, the width of the fin 84 may be reduced by performing athermal oxidation and removing the oxide layer. Accordingly, the fin 84may have a width which need not be defined by photolithography. A bufferoxide layer 86 also may be formed on the fin 84.

Referring to FIG. 11, dopants are implanted into the top T of the fin 84to form a first region 88. In some embodiments, the first region 88 maybe formed at a concentration of about 10¹⁵ atoms/cm³ to about 10¹⁹atoms/cm³ by implanting boron (B) or fluorine boron (BF₂) at dose ofabout 10¹¹ atoms/cm² to about 10¹⁴ atoms/cm². In some embodiments, theimplantation angle is between about 0° to about 10°.

Referring to FIG. 12, a second region 90 is formed by implanting ions inthe exposed surface of the fin 84. In some embodiments, the secondimpurity region 90 is formed uniformly on a whole surface of the fin 84by an oblique ion implantation method.

In some embodiments, the second impurity region 90 may be formed at aconcentration of about 10¹⁵ atoms/cm³ to about 10¹⁹ atoms/cm³ byimplanting boron (B) or fluorine boron (BF₂) at dose of about 10¹¹atoms/cm² to about 10¹⁴ atoms/cm². In some embodiments, the obliqueimplantation angle may be between about 10° and about 45°.

It will be understood that the implantation sequences of FIGS. 11 and 12may be reversed from that shown. Moreover, in contrast with embodimentsof FIGS. 4-8, an implant of FIG. 5 is not performed in embodiments ofFIGS. 10-13. In particular, in view of the semiconductor-on-insulatorstructure, there may be no need to form a layer in the substrate thatprevents punch-through, because the fin 84 is formed on the insulatinglayer 82.

Accordingly, as shown in FIG. 13, the first region 88 overlaps with thesecond region 90 to form a highly doped layer 88 a. The second region 90forms the lightly doped layer having uniform doping concentration. Thechannel region 100 of the transistor includes the heavily and lightlydoped layers 88 a and 90. As was the case with FIG. 8, the buffer oxidelayer may be removed. The gate insulation layer 102 may be formed. Thegate electrode 104 is formed. Source/drain regions 106 s and 106 d isformed, to complete the transistor.

In some embodiments of the present invention, the threshold voltage ofthe transistor may be controlled, for example to one volt or higher bydoping the channel region. As a result, current may be reduced duringthe off state. Moreover, the doping concentration at the top of the finmay be relatively high in some embodiments of the present invention,which can reduce or prevent formation of a channel before the mainchannel is turned on. In some embodiments, turn on of a parasitictransistor before the main channel may be reduced or prevented. It alsomay be possible to improve the switching characteristics by reducingsub-threshold swing values. Embodiments of the present invention may beused as a cell transistor of a DRAM device.

In the drawings and specification, there have been disclosed embodimentsof the invention and, although specific terms are employed, they areused in a generic and descriptive sense only and not for purposes oflimitation, the scope of the invention being set forth in the followingclaims.

1. A method of fabricating an integrated circuit transistor comprising:forming a fin extending vertically from a substrate; implanting a firstimpurity of a predetermined conductivity type in an upper portion of thefin; implanting a second impurity of the predetermined conductivity typein an entire exposed surface of the fin; forming a gate insulation layeron the fin; forming a gate electrode crossing over the fin on the gateinsulation layer; wherein a first layer of the predeterminedconductivity type comprised of the first and second impurities is formedin the upper portion of the fin; wherein a second layer of thepredetermined conductivity type comprising the second impurity is formedin the fin under the first layer; wherein the second layer is lightlydoped the predetermined conductivity type relative to the first layer;and wherein the second impurity of the predetermined conductivity typeis implanted using an oblique ion implantation so as to provide uniformconcentration of the second impurity across the fin, between opposingsidewalls thereof.
 2. The method of claim 1, further comprisingimplanting a third impurity of the predetermined conductivity type inthe fin beneath the gate electrode that does not extend laterally beyondopposing sidewalls of the fin.
 3. The method of claim 1, wherein the finis formed by patterning a semiconductor layer of the substrate comprisedof a stacked structure of an insulation layer and the semiconductorlayer on a support substrate.
 4. The method of claim 1, wherein formingthe fin comprises: patterning a bulk substrate comprised of thesemiconductor layer to form a portion extending vertically; forming aninsulation layer on the substrate; and recessing the insulation layer toform the fin projecting from the insulation layer.
 5. A method offabricating an integrated circuit field effect transistor comprising:forming a fin that projects away from an integrated circuit substrate,extends along the integrated circuit substrate and includes a top thatis remote from the integrated circuit substrate; implanting ions of apredetermined conductivity type into the fin orthogonal to thesubstrate; implanting ions of the predetermined conductivity type intothe fin oblique to the substrate; and forming spaced apart source anddrain regions in the fin and an insulated gate on the fin, whereinimplanting ions of the predetermined conductivity type into the finorthogonal and oblique to the substrate is carried out before formingthe insulated gate on the fin, and forming the spaced apart source anddrain regions in the fin is carried out after forming the insulated gateon the fin.
 6. A method according to claim 5 further comprising: againimplanting ions of the predetermined conductivity type into the finorthogonal to the substrate and not extending laterally beyond opposingsidewalls of the fin.
 7. A method according to claim 5, wherein theintegrated circuit substrate comprises a semiconductor layer on aninsulating layer on a substrate, and wherein forming a fin comprises:patterning the semiconductor layer.
 8. A method according to claim 5,wherein the integrated circuit substrate comprises a bulk semiconductorsubstrate and wherein forming a fin comprises: patterning the bulksemiconductor substrate to form a portion extending away from the bulksemiconductor substrate; forming an insulation layer on the substrate;and recessing the insulation layer to form the fin that projects awayfrom the insulation layer.
 9. A method of fabricating an integratedcircuit field effect transistor comprising: forming a fin that projectsaway from an integrated circuit substrate, extends along the integratedcircuit substrate and includes a top that is remote from the integratedcircuit substrate and a base that is adjacent the integrated circuitsubstrate; implanting ions of a predetermined conductivity type into thefin to form a first region adjacent the top; implanting ions of thepredetermined conductivity type into the fin to form a second regionbetween the base and top; implanting ions of the predeterminedconductivity type into the fin to form a third region adjacent the base;and forming spaced apart source and drain regions in the fin and aninsulated gate on the fin, wherein implanting ions of the predeterminedconductivity type into the fin to form a third region adjacent the basecomprises implanting ions of the predetermined conductivity type intothe fin, to form a third region adjacent the base that does not extendlaterally beyond opposing sidewalls of the fin.
 10. A method accordingto claim 9, wherein the integrated circuit substrate comprises asemiconductor layer on an insulating layer on a substrate, and whereinforming a fin comprises: patterning the semiconductor layer.
 11. Amethod according to claim 9, wherein the integrated circuit substratecomprises a bulk semiconductor substrate and wherein forming a fincomprises: patterning the bulk semiconductor substrate to form a portionextending away from the bulk semiconductor substrate; forming aninsulation layer on the substrate; and recessing the insulation layer toform the fin that projects away from the insulation layer.
 12. A methodaccording to claim 9 wherein implanting ions of the predeterminedconductivity type into the fin to form the first, second and thirdregions is carried out before forming the insulated gate on the fin, andforming the spaced apart source and drain regions in the fin is carriedout after forming the insulated gate on the fin.